Title :
New insight into tantalum pentoxide Metal-Insulator-Metal (MIM) capacitors: Leakage current modeling, self-heating, reliability assessment and industrial applications
Author :
Martinez, V. ; Besset, C. ; Monsieur, F. ; Ney, D. ; Montes, L. ; Ghibaudo, G.
Author_Institution :
STMicroelectron., Crolles
fDate :
April 27 2008-May 1 2008
Abstract :
In this study, conduction asymmetry is analyzed using asymmetric stacks in order to appreciate the cathode role. Then original test structures are used to highlight fringe leakage and to model asymmetry in a pure Ta2O5 capacitor for both surface and peripheral currents. Finally, the impact of peripheral on self-heating and consequently on reliability parameters is deeply investigated. Important information are then provided regarding intrinsic MIM characteristics, process optimization, reliability methodology and design rules.
Keywords :
MIM devices; capacitors; leakage currents; reliability; tantalum compounds; Ta2O5; asymmetric stacks; conduction asymmetry analysis; design rules; fringe leakage; industrial applications; intrinsic MIM characteristics; leakage current modeling; process optimization; reliability assessment methodology; reliability parameters; self-heating effect; tantalum pentoxide metal-insulator-metal capacitors; Aluminum oxide; Electrodes; Geometry; Leakage current; MIM capacitors; MOSFETs; Metal-insulator structures; Metals industry; Thermal stresses; Tin; MIM capacitor; SCLC; leakage; reliability; self-heating; tantalum pentoxide; thermal breakdown;
Conference_Titel :
Reliability Physics Symposium, 2008. IRPS 2008. IEEE International
Conference_Location :
Phoenix, AZ
Print_ISBN :
978-1-4244-2049-0
Electronic_ISBN :
978-1-4244-2050-6
DOI :
10.1109/RELPHY.2008.4558891
