Assembly of a novel MEMS-based 3D vibrating micro-scale co-ordinate measuring machine probe using desktop factory automation

Author

Claverley, James D. ; Sheu, Dong-Yea ; Burisch, Arne ; Leach, Richard K. ; Raatz, Annika

Author_Institution

Eng. Meas. Div., Nat. Phys. Lab., Teddington, UK

fYear

2011

fDate

25-27 May 2011

Firstpage

1

Lastpage

5

Abstract

In this paper the assembly of a novel micro-scale coordinate measuring machine (CMM) probe is considered. A working micro-scale CMM probe is assembled from a MEMS device and a stylus produced by micro-electro-discharge machining. The production technique of the micro-scale parts is discussed and two methods for assembly are presented.

Keywords

assembling; coordinate measuring machines; electrical discharge machining; factory automation; micromachining; micromechanical devices; vibrations; MEMS device; MEMS-based 3D vibrating microscale coordinate measuring machine probe; assembly; desktop factory automation; microelectro-discharge machining; microscale CMM probe; microscale parts; production technique; stylus; Accuracy; Assembly; Coordinate measuring machines; Probes; Robots; Surface treatment; Vibration measurement; MEMS; desktop factory; micro-CMM; micro-assembly; prototyping; semi-automation;

fLanguage

English

Publisher

ieee

Conference_Titel

Assembly and Manufacturing (ISAM), 2011 IEEE International Symposium on

Conference_Location

Tampere

ISSN

Pending

Print_ISBN

978-1-61284-342-1

Electronic_ISBN

Pending

Type

conf

DOI

10.1109/ISAM.2011.5942327

Filename

5942327