Title :
Assembly of a novel MEMS-based 3D vibrating micro-scale co-ordinate measuring machine probe using desktop factory automation
Author :
Claverley, James D. ; Sheu, Dong-Yea ; Burisch, Arne ; Leach, Richard K. ; Raatz, Annika
Author_Institution :
Eng. Meas. Div., Nat. Phys. Lab., Teddington, UK
Abstract :
In this paper the assembly of a novel micro-scale coordinate measuring machine (CMM) probe is considered. A working micro-scale CMM probe is assembled from a MEMS device and a stylus produced by micro-electro-discharge machining. The production technique of the micro-scale parts is discussed and two methods for assembly are presented.
Keywords :
assembling; coordinate measuring machines; electrical discharge machining; factory automation; micromachining; micromechanical devices; vibrations; MEMS device; MEMS-based 3D vibrating microscale coordinate measuring machine probe; assembly; desktop factory automation; microelectro-discharge machining; microscale CMM probe; microscale parts; production technique; stylus; Accuracy; Assembly; Coordinate measuring machines; Probes; Robots; Surface treatment; Vibration measurement; MEMS; desktop factory; micro-CMM; micro-assembly; prototyping; semi-automation;
Conference_Titel :
Assembly and Manufacturing (ISAM), 2011 IEEE International Symposium on
Conference_Location :
Tampere
Print_ISBN :
978-1-61284-342-1
Electronic_ISBN :
Pending
DOI :
10.1109/ISAM.2011.5942327
