Application of Atomic Force Microscopy on the Nanometer Scale Surface Roughness Measurement

Author

Han, Xianwu ; Chen, Xiao´an ; Yang, Xueheng ; Bai, Haihui ; Li, Zhiqiang ; Su, Xiaoping

Author_Institution

State Key Lab. of Mech. Transmission, Chongqing Univ.

fYear

2006

fDate

18-21 Jan. 2006

Firstpage

131

Lastpage

135

Abstract

In this paper, The datum line assessing surface roughness parameters and main three profile height parameters of surface roughness are introduced in detail, and the emphasis is laid on the operation principle of Atomic Force Microscopy Institute of Particle Physics Chongqing University (AFM.IPC-208B) and its software implementation method on the nanometer scale surface roughness measurement. The three-dimensional AFM image of polished stainless steel surface in real space was obtained by AFM.IPC-208B, the surface data were analyzed and transacted by special evaluator, and the values of three profile height parameters were obtained. Finally, the experimental results were analyzed briefly

Keywords

atomic force microscopy; stainless steel; surface topography measurement; 3D AFM image; Atomic Force Microscopy Institute of Particle Physics Chongqing University; atomic force microscopy; nanometer scale surface roughness measurement; polished stainless steel surface; real space; software implementation; Atomic force microscopy; Atomic measurements; Data analysis; Force measurement; Image analysis; Particle measurements; Rough surfaces; Software measurement; Steel; Surface roughness; AFM; evaluator; mathematical model; nanometer scale; surface roughness;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on

Conference_Location

Zhuhai

Print_ISBN

1-4244-0139-9

Electronic_ISBN

1-4244-0140-2

Type

conf

DOI

10.1109/NEMS.2006.334654

Filename

4134919