DocumentCode
2052365
Title
Nanotechnology and nanoscaled materials for microsystems application
Author
Mladlenov, Georgiy ; Koleva, Elena ; Yakymenko, Yuriy ; Spivak, Viktor ; Bogdan, Oleksandr ; Orlov, Anatoliy
Author_Institution
Inst. of Electron. BAS, Sofia, Bulgaria
fYear
2010
fDate
23-27 Feb. 2010
Firstpage
354
Lastpage
355
Abstract
Stages of formation and some perspective aspects of nanotechnology development, in particular, nanoelectronics, getting nanomaterials and microsystems device is analyzed in this report.
Keywords
nanoelectromechanical devices; nanoelectronics; nanostructured materials; microsystem device; nanodimensional mechanical structures; nanoelectronics; nanomaterials; nanotechnology; Atomic measurements; Conducting materials; Electrons; Manufacturing; Nanoelectronics; Nanomaterials; Nanoscale devices; Nanostructured materials; Nanotechnology; Optical surface waves; Electronic and Ion Lithographic; Microsystems; Piezoelectrics Device; Resonators; Synthesis Of Nanostructure; Thin Tapes; anoelectronics;
fLanguage
English
Publisher
ieee
Conference_Titel
Modern Problems of Radio Engineering, Telecommunications and Computer Science (TCSET), 2010 International Conference on
Conference_Location
Lviv-Slavske
Print_ISBN
978-966-553-875-2
Electronic_ISBN
978-966-553-901-8
Type
conf
Filename
5445974
Link To Document