Title :
Fabrication and characterization of cobalt nanoparticles by IBICVD
Author :
Ko-Wei Lin ; Kyongha Kang ; Kageyama, Y. ; Suzuki, T.
Author_Institution :
Inf. Storage Mater. Lab., Toyota Technol. Inst., Nagoya, Japan
fDate :
March 30 2003-April 3 2003
Abstract :
The focus of this study is to explore the size limitation and to study the morphology and the structure of cobalt particles by a novel technique.
Keywords :
chemical vapour deposition; cobalt; dissociation; ferromagnetic materials; focused ion beam technology; magnetic particles; nanoparticles; particle size; sputter etching; surface morphology; Co; cobalt nanoparticles; dissociation; ion beam induced CVD; particle size; sputter etching; surface morphology; Amorphous magnetic materials; Atomic force microscopy; Cobalt; Etching; Fabrication; Focusing; Material storage; Nanoparticles; Scanning electron microscopy; Transmission electron microscopy;
Conference_Titel :
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7647-1
DOI :
10.1109/INTMAG.2003.1230704
