Title :
The model of the MEMS disk bandpass filter operating in radial mode
Author :
Yakymenko, Yuriy ; Pilinsky, Volodymyr ; Petrishev, Oleg ; Yanovska, Yuliy ; Bogdan, Oleksandr ; Zelenskyy, Sergiy
Author_Institution :
Res. Inst. Appl. Electron., Nat. Tech. Univ. of Ukraine KPI, Kiev, Ukraine
Abstract :
In this paper main characteristics of a piezoceramic bandwidth filter that is used radial oscillations for its work calculation method is proposed. Also there are considered influence of next parameters: distance to second electrode, first electrode width and electric load value. MEMS bandwidth filter designing are given.
Keywords :
band-pass filters; crystal filters; discs (structures); electrodes; micromechanical devices; oscillations; piezoceramics; MEMS disk; bandpass filter; electric load; electrode; piezoceramic bandwidth filter; radial oscillations; work calculation method; Band pass filters; Bandwidth; Electrodes; Geometry; Leg; Micromechanical devices; Microwave filters; Piezoelectric materials; Resonant frequency; Resonator filters; MEMS; bandwidth filter; frequency characteristic; piezoceramic; radial oscillations;
Conference_Titel :
Modern Problems of Radio Engineering, Telecommunications and Computer Science (TCSET), 2010 International Conference on
Conference_Location :
Lviv-Slavske
Print_ISBN :
978-966-553-875-2
Electronic_ISBN :
978-966-553-901-8
