Synthesis of GaN Nanorods with Vertebra-like Morphology

GaN nanorods with vertebra-like morphology were synthesized by nitriding Ga₂O₃/ZnO films at 1000degC for 20min. Ga₂O₃ thin films and ZnO middle layers were pre-deposited in turn on Si(III) substrates by r.f. magnetron sputtering system. In the flowing ammonia ambient, ZnO was reducted to Zn and Zn sublimated at 1000degC. Ga₂O₃ was reducted to Ga ₂O and Ga₂O reacted with NH₃ to synthesize GaN nanorods in the help of the sublimation of Zn. The structure and morphology of the nanorods were studied by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The composition of GaN nanorods was studied by energy dispersive spectroscopy (EDS) and fourier transform infrared (FTIR) system