Contributions of Novel Magnetic Granular Film in RF-MEMS Planar Integrated Inductor

Author

Zhao, Jiahao ; Zhu, Jing ; Fang, Jie ; Chen, Zhongmin ; Liu, Zewen

Author_Institution

Lab. of Adv. Mater., Tsinghua Univ., Beijing

fYear

2006

fDate

18-21 Jan. 2006

Firstpage

270

Lastpage

273

Abstract

Magnetic medium is an effective approach to RF planar magnetic inductor confirmed by computer simulations. The magnetic inductor was designed and fabricated using novel Permalloy-SiO₂ (PS) granular film as magnetic core. The granular film shows excellent soft magnetic properties and high resistivity by adjusting the composition and microstructure. The inductor with PS granular film exhibits a higher L than air-core inductor and a considerable Q above 10. The anisotropy of the granular film generated in deposition process make the magnetic inductor has a very high self-resonance frequency peak

Keywords

electromechanical effects; inductors; magnetic thin films; micromechanical devices; soft magnetic materials; Q-factor; RF planar magnetic inductor; RF-MEMS planar integrated inductor; composition adjustment; electrical resistivity; granular film anisotropy; magnetic core; magnetic granular film; magnetic inductor design; magnetic inductor fabrication; microstructure adjustment; permalloy-silica granular film; radiofrequency micro-electromechanical system; self resonance frequency peak; soft magnetic properties; Computer simulation; Conductivity; Magnetic anisotropy; Magnetic cores; Magnetic films; Magnetic properties; Perpendicular magnetic anisotropy; Radio frequency; Radiofrequency microelectromechanical systems; Soft magnetic materials; Magnetic Granular Film; Permalloy-SiO2; RF-MEMS Inductor; Soft magnetic; high resistivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on

Conference_Location

Zhuhai

Print_ISBN

1-4244-0139-9

Electronic_ISBN

1-4244-0140-2

Type

conf

DOI

10.1109/NEMS.2006.334720

Filename

4134950