DocumentCode
2053202
Title
Numerical Studies on Nano-particle Removal with Micro-droplet Spray
Author
Sun, Zhenhai ; Han, Ruijing
Author_Institution
Shanghai Inst. of Microsyst. & Inf. Technol., Chinese Acad. of Sci., Shanghai
fYear
2006
fDate
18-21 Jan. 2006
Firstpage
303
Lastpage
305
Abstract
Nanoparticles are difficult to remove because it is much more difficult to deliver the necessary force to smaller dimensions. We investigate in this paper a new method using micro-droplet spray to remove nanoparticles from solid flat surface. With a droplet diameter between 50 and 100 mum, we evaluate the lift force and drag force acting on spherical particles. The particle diameter is less than 100 nm. The hydrodynamic force is a function of initial impact velocity and particle radius. Under different condition, we simulate droplet impact progress and calculate the hydrodynamic force. Comparing with adhesive van der Waals force, proper condition is found to remove nanoparticles from surface
Keywords
drag; drops; hydrodynamics; microfluidics; nanoparticles; sprays; surface cleaning; van der Waals forces; 50 to 100 micron; adhesive van der Waals force; drag force; droplet spray; hydrodynamic force; initial impact velocity; lift force; micro-droplet spray; nanoparticle removal; particle diameter; solid flat surface; Cleaning; Drag; Fluid dynamics; Force measurement; Hydrodynamics; Nanoparticles; Navier-Stokes equations; Semiconductor device manufacture; Spraying; Sun; drag force; droplet spray; lift force; nano-particle;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on
Conference_Location
Zhuhai
Print_ISBN
1-4244-0139-9
Electronic_ISBN
1-4244-0140-2
Type
conf
DOI
10.1109/NEMS.2006.334728
Filename
4134958
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