Title :
Model of a piezoelectric microaccelerometer based on two piezoelectric plates separated by a layer of polysilicon
Author :
Kushnir, Yurij ; Lobur, Mykhaylo
Abstract :
This paper presents an alternative design solution for a piezoelectric sensor based on two plates separated by a polysilicon solid body.
Keywords :
accelerometers; elemental semiconductors; microsensors; piezoelectric devices; silicon; alternative design solution; piezoelectric microaccelerometer; piezoelectric plates; piezoelectric sensor; polysilicon layer; Capacitive sensors; Dielectrics; Equations; Finite element methods; Mechanical sensors; Micromechanical devices; Piezoelectric effect; Piezoelectric materials; Shape; Voltage; ANSYS; FEM; MEMS; accelerometer; piezoelectric effect;
Conference_Titel :
Modern Problems of Radio Engineering, Telecommunications and Computer Science (TCSET), 2010 International Conference on
Conference_Location :
Lviv-Slavske
Print_ISBN :
978-966-553-875-2
Electronic_ISBN :
978-966-553-901-8
