• DocumentCode
    2053362
  • Title

    MEMS design for an efficient electrostatic energy harvester combined with components of precision mechanics

  • Author

    Schaufuss, Joerg ; Mehner, Jan

  • Author_Institution
    Dept. Microsyst. & Precision Eng., Chemnitz Univ. of Technol., Chemnitz, Germany
  • fYear
    2012
  • fDate
    20-23 March 2012
  • Firstpage
    1
  • Lastpage
    6
  • Abstract
    In this document approaches and results of design optimizations for a high efficient electrostatic energy harvester are presented. The harvester consists of MEMS components and components made of precision mechanics. This combination allows frequency tuning and an output power in the range of microwatts for excitation amplitudes in the range of tenths m/s2.
  • Keywords
    design engineering; electrostatic devices; energy harvesting; micromechanical devices; MEMS components; design optimizations; electrostatic energy harvesters; excitation amplitudes; frequency tuning; precision mechanics; Capacitance; Electrodes; Electrostatics; Fingers; Layout; Silicon; Springs; Electrostatic energy harvester; MEMS design;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Systems, Signals and Devices (SSD), 2012 9th International Multi-Conference on
  • Conference_Location
    Chemnitz
  • Print_ISBN
    978-1-4673-1590-6
  • Electronic_ISBN
    978-1-4673-1589-0
  • Type

    conf

  • DOI
    10.1109/SSD.2012.6197965
  • Filename
    6197965
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2053362