Micro Fabrication with Selective Laser Micro Sintering

Silicon-based MEMS techniques are very popular for the manufacture of micro parts. Only a limited number of materials can be processed by these techniques. As the rapid development of Selective Laser Sintering(SLS) in laser rapid prototyping field almost any material can be used. Laser Micro Sintering(LMS) was recently introduced in the fabrication of 3D MEMS parts. The main difference between SLS and LMS technology is the powder feeding method and laser system. In this paper a newly developed powder feeding system has been reported. The system makes use of ultrasonic device to deposit micron powder particles to form thin pattern on the substrate. The powder can be micro sintered selectively by a micro-sized fiber laser beam. After optimization of experimental parameters we can finally sinter 3D micro parts with micron metallic powder