Title :
Patterned growth of ZnO nanowires using NAPLD with nano-imprint
Author :
Toya, K. ; Kubo, K. ; Tsuta, K. ; Kumeda, A. ; Nakamura, D. ; Higashihata, M. ; Okada, T. ; Asano, T.
Author_Institution :
Grad. Sch. of Inf. Sci. & Electr. Eng., Kyushu Univ., Fukuoka, Japan
Abstract :
For the practical optoelectronic applications based on the ZnO nanowires, control the growth position of ZnO nanowires is essentially required. In this paper, we describe progress of synthesis the patterned growth of ZnO nanowires by chemical vapor deposition method and nanoparticle assisted pulsed laser deposition method using nano-imprinting technique.
Keywords :
II-VI semiconductors; chemical vapour deposition; nanofabrication; nanolithography; nanoparticles; nanopatterning; pulsed laser deposition; semiconductor growth; wide band gap semiconductors; zinc compounds; ZnO; chemical vapor deposition; nanoimprinting; nanoparticle assisted pulsed laser deposition; nanowires; patterned growth;
Conference_Titel :
TENCON 2010 - 2010 IEEE Region 10 Conference
Conference_Location :
Fukuoka
Print_ISBN :
978-1-4244-6889-8
DOI :
10.1109/TENCON.2010.5686659
