DocumentCode
2054037
Title
Patterned growth of ZnO nanowires using NAPLD with nano-imprint
Author
Toya, K. ; Kubo, K. ; Tsuta, K. ; Kumeda, A. ; Nakamura, D. ; Higashihata, M. ; Okada, T. ; Asano, T.
Author_Institution
Grad. Sch. of Inf. Sci. & Electr. Eng., Kyushu Univ., Fukuoka, Japan
fYear
2010
fDate
21-24 Nov. 2010
Firstpage
2243
Lastpage
2243
Abstract
For the practical optoelectronic applications based on the ZnO nanowires, control the growth position of ZnO nanowires is essentially required. In this paper, we describe progress of synthesis the patterned growth of ZnO nanowires by chemical vapor deposition method and nanoparticle assisted pulsed laser deposition method using nano-imprinting technique.
Keywords
II-VI semiconductors; chemical vapour deposition; nanofabrication; nanolithography; nanoparticles; nanopatterning; pulsed laser deposition; semiconductor growth; wide band gap semiconductors; zinc compounds; ZnO; chemical vapor deposition; nanoimprinting; nanoparticle assisted pulsed laser deposition; nanowires; patterned growth;
fLanguage
English
Publisher
ieee
Conference_Titel
TENCON 2010 - 2010 IEEE Region 10 Conference
Conference_Location
Fukuoka
ISSN
pending
Print_ISBN
978-1-4244-6889-8
Type
conf
DOI
10.1109/TENCON.2010.5686659
Filename
5686659
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