• DocumentCode
    2054641
  • Title

    MEMS acoustic emission sensor with mechanical noise rejection

  • Author

    Auerswald, C. ; Sorger, A. ; Dienel, M. ; Shaporin, A. ; Mehner, J.

  • Author_Institution
    Microsyst. & Precision Eng., Chemnitz Univ. of Technol., Chemnitz, Germany
  • fYear
    2012
  • fDate
    20-23 March 2012
  • Firstpage
    1
  • Lastpage
    6
  • Abstract
    The presented paper describes the use of a new approach to develop a high frequency acceleration sensor with good low frequency noise rejection and in contrast to conventional resonant sensors a short settling time, as it is needed for acoustic emission testing.
  • Keywords
    acceleration measurement; acoustic emission; acoustic emission testing; microsensors; MEMS acoustic emission sensors; acoustic emission testing; high frequency acceleration sensor; mechanical noise rejection; Acceleration; Acoustic emission; Electrodes; Low-frequency noise; Micromechanical devices; Resonant frequency; Sensor systems; Time frequency analysis; Acoustic Emission; MEMS; condition monitoring; mechanical bandpass; structural health;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Systems, Signals and Devices (SSD), 2012 9th International Multi-Conference on
  • Conference_Location
    Chemnitz
  • Print_ISBN
    978-1-4673-1590-6
  • Electronic_ISBN
    978-1-4673-1589-0
  • Type

    conf

  • DOI
    10.1109/SSD.2012.6198017
  • Filename
    6198017
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2054641