DocumentCode
2055012
Title
Nanofabrication Challenges for NEMS
Author
Cui, Zheng ; Gu, Changzhi
Author_Institution
Central Micro Struct. Facility, Rutherford Appleton Lab., Chilton,
fYear
2006
fDate
18-21 Jan. 2006
Firstpage
607
Lastpage
610
Abstract
Nanofabrication is the basis for any NEMS. How small a structure can be made? What are the available technologies for making nanostructures? These are the questions constantly asked by NEMS researchers. This paper gave an overview of current nanofabrication technologies and the challenges for NEMS applications. The techniques for making nanostructures are grouped into direct, indirect and self-assembly methods. Each group of techniques is analyzed for their capability and limits, which provides a rough guide for researchers to choose appropriate nanofabrication routes for their own applications
Keywords
micromechanical devices; nanotechnology; NEMS; nanofabrication; self-assembly; Electron optics; Laboratories; Lithography; Microelectronics; Micromechanical devices; Nanobioscience; Nanoelectromechanical systems; Nanofabrication; Nanostructures; Self-assembly; MEMS; NEMS; microfabrication; nanofabrication;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on
Conference_Location
Zhuhai
Print_ISBN
1-4244-0139-9
Electronic_ISBN
1-4244-0140-2
Type
conf
DOI
10.1109/NEMS.2006.334855
Filename
4135028
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