A Compact 5-bit Switched-line Digital MEMS Phase Shifter

Author

Jian, Zhu ; Wei, Yu-Yuan ; Chen, Chen ; Yong, Zhang ; Le, Lu

Author_Institution

Nanjing Electron. Devices Inst., Nanjing

fYear

2006

fDate

18-21 Jan. 2006

Firstpage

623

Lastpage

626

Abstract

A compact 5-bit digital MEMS phase shifter that employs 3-port RF MEMS switches is designed and fabricated. It is based on the switched-line design and totally twenty switches are used. Measurements of the 3-port switch indicate an insertion loss of 0.66dB and an isolation of 23.3dB at 10GHz. The 5-bit MEMS phase shifter are fabricated on 200 mum high resistivity silicon substrates with total size of 7 mm times 4 mm. PCM (Process Control Monitor) is applied to control the stability and consistency of the process. The phase shifter performed well in X band, with an average 3.6dB insertion loss and phase shift error less than 5deg at 10GHz.

Keywords

microswitches; phase shifters; substrates; 3-port RF MEMS switches; 5-bit switched-line digital MEMS phase; process control monitor; silicon substrates; Conductivity; Insertion loss; Loss measurement; Micromechanical devices; Phase change materials; Phase shifters; Process control; Radiofrequency microelectromechanical systems; Silicon; Switches; Microelectromechanical systems (MEMS); phase shifter; process control monitor (PCM); switched-line;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on

Conference_Location

Zhuhai

Print_ISBN

1-4244-0139-9

Electronic_ISBN

1-4244-0140-2

Type

conf

DOI

10.1109/NEMS.2006.334859

Filename

4135032