Title :
Monte Carlo simulation of film morphology of carbon overcoat
Author :
Ma, Xiaoding ; Stirniman, Michael ; Gui, Jing
Author_Institution :
Seagate Technol. LLC, Fremont, CA, USA
fDate :
March 30 2003-April 3 2003
Abstract :
In this paper, we describe carbon film morphology under different deposition conditions using Monte Carlo simulation.
Keywords :
Monte Carlo methods; carbon; sputter deposition; thin films; C; Monte Carlo simulation; carbon film morphology; sputter deposition; Atomic layer deposition; Chemical technology; Degradation; Lattices; Magnetic films; Magnetic recording; Protection; Substrates; Surface morphology; Tribology;
Conference_Titel :
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7647-1
DOI :
10.1109/INTMAG.2003.1230816
