Title :
Precise calibration of the sub-10nm flying height of slider by using bump response method
Author :
Zhang, Jun ; Sheng, Ganf
Author_Institution :
Data Storage Inst., Singapore, Singapore
fDate :
March 30 2003-April 3 2003
Abstract :
In this paper, two kinds of commercial available glide sliders (two rails) are employed to conduct bump avalanche tests to further understand the complicated dynamic behavior of slider-bump interaction so as to provide basis for the metrology of head FH calibration by using bump with known height.
Keywords :
calibration; chemical sensors; laser materials processing; lead compounds; magnetic heads; 10 nm; PZT; PbZrO3TiO3; bump avalanche tests; bump response method; dynamic properties; head flying height calibration; metrology; slider- bump interaction; Calibration; Disk recording; Interference; Measurement standards; Metrology; Niobium; Optical sensors; Rails; Resonance; Testing;
Conference_Titel :
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7647-1
DOI :
10.1109/INTMAG.2003.1230828
