Title :
The Al2O3 nanowire grown on silicon chips by electrochemical reaction under AFM probe
Author :
Geng, Xiang ; Jiao, Zheng ; Wang, Haobo ; Fu, Qun ; Zhong, Haijian ; Li, Zhen
Author_Institution :
Shanghai Appl. Radiat. Inst., Shanghai Univ.
Abstract :
In this paper the Al2O3 nanowire is grown on silicon chips by electrochemical reaction under AFM probe. The obtained Al2O3 nanowire is regular arranged, the length and width of the nanowire can be controlled by adjusting applied voltage and scanning rate of AFM probe
Keywords :
aluminium compounds; atomic force microscopy; electrochemistry; nanowires; AFM probe; Al2O3-Si; electrochemical reaction; nanowires; silicon chips; Aluminum oxide; Carbon nanotubes; Nanoscale devices; Nanostructured materials; Probes; Semiconductor materials; Silicon; Sputtering; Systems engineering and theory; Voltage control; AFM; Al2O3; electrochemical; nanowire;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on
Conference_Location :
Zhuhai
Print_ISBN :
1-4244-0139-9
Electronic_ISBN :
1-4244-0140-2
DOI :
10.1109/NEMS.2006.334871
