Title :
An Inline Type Microwave Power Sensor Using GaAs MMIC Process
Author :
Han, Lei ; Qing An Huang ; Xiao Ping Liao
Author_Institution :
Key Lab. of MEMS of Minist. of Educ., Southeast Univ., Nanjing
Abstract :
The theory, design, fabrication and measurements of a novel structure for measuring the power of microwave signals are presented based on MEMS technology. The advantage of this sensor is that it measures the microwave power coupled from the CPW line by the MEMS membrane. In this method the signal is available during the power detection. The fabrication of the novel power sensor is fully compatible with the GaAs MMIC process. The simulation, process and experiment results of this sensor are given
Keywords :
III-V semiconductors; MMIC; coplanar waveguides; gallium arsenide; microsensors; microwave detectors; CPW line; GaAs; MEMS membrane; MMIC process; microwave power sensor; Fabrication; Gallium arsenide; MMICs; Micromechanical devices; Microwave measurements; Microwave sensors; Microwave theory and techniques; Power measurement; Process design; Signal design; GaAs MMIC process; MEMS technology; inline type; power sensor;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on
Conference_Location :
Zhuhai
Print_ISBN :
1-4244-0139-9
Electronic_ISBN :
1-4244-0140-2
DOI :
10.1109/NEMS.2006.334878
