Approach of Decreasing Effect of Temperature on Positioning Accuracy of Ultra-precision Micro-feed System

Author

Zhong, Li ; Ding, Zhenliang ; Yuan, Feng

Author_Institution

Dept. of Autom. Meas. & Control, Harbin Inst. of Technol., Harbin

fYear

2006

fDate

18-21 Jan. 2006

Firstpage

779

Lastpage

783

Abstract

Ultra-precision flexure-hinge guided micro-feed system driven by piezoelectric actuator was applied in many fields in which precise motion was needed. Temperature effects on positioning accuracy of system are analyzed. The temperature measurement and control system are described for the compensation of temperature errors on micro-feed stage and interferometer measurement. The temperature control system kept temperature variation of 0.1degC at 20degC, and 0.05degC temperature drift, which can meet the limit of precise positioning accuracy of micro-feed system.

Keywords

compensation; light interferometry; piezoelectric actuators; position control; temperature control; temperature measurement; interferometer measurement; piezoelectric actuator; temperature compensation; temperature control system; temperature drift; temperature measurement; ultra-precision flexure-hinge guided micro-feed system; Control systems; Displacement control; Displacement measurement; Error correction; Interference; Optical interferometry; Piezoelectric actuators; Position measurement; Temperature control; Temperature measurement; micro-feed stage; piezoelectric acuator; temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on

Conference_Location

Zhuhai

Print_ISBN

1-4244-0139-9

Electronic_ISBN

1-4244-0140-2

Type

conf

DOI

10.1109/NEMS.2006.334894

Filename

4135067