DocumentCode
2056235
Title
Observer based determination of the crystal diameter in Czochralski crystal growth utilizing algorithmic differentiation
Author
Winkler, Jan ; Röbenack, Klaus
Author_Institution
Fak. Elektrotechnik und Informationstechnik, Tech. Univ. Dresden, Dresden, Germany
fYear
2012
fDate
20-23 March 2012
Firstpage
1
Lastpage
6
Abstract
This contribution deals with the implementation of a nonlinear state observer (often referred to as smart sensor, soft sensor or virtual sensor) for the reconstruction of not directly measured system quantities in the Czochralski crystal growth process. These quantities are required in automatic control systems used to ensure proper crystal growth. The implementation of the observer on the limited computer hardware available at the growth plants is a challenging task because of the complexity of the underlying mathematical model and the necessity to deal with high order partial and total derivatives of the system equations. Using the method of algorithmic differentiation an efficient way is proposed to implement such an observer. The straightforwardness of the approach is illustrated step by step and experimental results are given.
Keywords
crystal growth from melt; differentiation; nonlinear control systems; observers; partial differential equations; semiconductor industry; Czochralski crystal growth process; algorithmic differentiation; automatic control system; computer hardware; crystal diameter; growth plant; mathematical model; nonlinear state observer; Boron; Computational modeling; Crystals; Mathematical model; Observers; Software algorithms; Trajectory;
fLanguage
English
Publisher
ieee
Conference_Titel
Systems, Signals and Devices (SSD), 2012 9th International Multi-Conference on
Conference_Location
Chemnitz
Print_ISBN
978-1-4673-1590-6
Electronic_ISBN
978-1-4673-1589-0
Type
conf
DOI
10.1109/SSD.2012.6198080
Filename
6198080
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