• DocumentCode
    2056235
  • Title

    Observer based determination of the crystal diameter in Czochralski crystal growth utilizing algorithmic differentiation

  • Author

    Winkler, Jan ; Röbenack, Klaus

  • Author_Institution
    Fak. Elektrotechnik und Informationstechnik, Tech. Univ. Dresden, Dresden, Germany
  • fYear
    2012
  • fDate
    20-23 March 2012
  • Firstpage
    1
  • Lastpage
    6
  • Abstract
    This contribution deals with the implementation of a nonlinear state observer (often referred to as smart sensor, soft sensor or virtual sensor) for the reconstruction of not directly measured system quantities in the Czochralski crystal growth process. These quantities are required in automatic control systems used to ensure proper crystal growth. The implementation of the observer on the limited computer hardware available at the growth plants is a challenging task because of the complexity of the underlying mathematical model and the necessity to deal with high order partial and total derivatives of the system equations. Using the method of algorithmic differentiation an efficient way is proposed to implement such an observer. The straightforwardness of the approach is illustrated step by step and experimental results are given.
  • Keywords
    crystal growth from melt; differentiation; nonlinear control systems; observers; partial differential equations; semiconductor industry; Czochralski crystal growth process; algorithmic differentiation; automatic control system; computer hardware; crystal diameter; growth plant; mathematical model; nonlinear state observer; Boron; Computational modeling; Crystals; Mathematical model; Observers; Software algorithms; Trajectory;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Systems, Signals and Devices (SSD), 2012 9th International Multi-Conference on
  • Conference_Location
    Chemnitz
  • Print_ISBN
    978-1-4673-1590-6
  • Electronic_ISBN
    978-1-4673-1589-0
  • Type

    conf

  • DOI
    10.1109/SSD.2012.6198080
  • Filename
    6198080