Title : 
Structuring of carbon nanotubes for field emission based movement sensors
         
        
            Author : 
Loschek, Sergei ; Hermann, Sascha ; Yu, Haibo ; Schulz, Stefan E. ; Gessner, Thomas
         
        
            Author_Institution : 
Center for Microtechnologies, Chemnitz Univ. of Technol., Chemnitz, Germany
         
        
        
        
        
        
            Abstract : 
This paper addresses the exploitation of the field emitting properties of carbon nanotubes for movement sensor applications. To utilize this transducer principle a well defined gap between the field emitting carbon nanotubes and the counter electrode must be formed. Three different methods to dissect the dielectrophoretically deposited carbon nanotubes in a reproducible way are presented.
         
        
            Keywords : 
carbon nanotubes; field emission; nanosensors; counter electrode; dielectrophoretically deposited carbon nanotubes; field emitting properties; movement sensor applications; transducer principle; Carbon nanotubes; Electric breakdown; Electrical resistance measurement; Electrodes; Ion beams; Micromechanical devices; Sensors; MEMS/NEMS; carbon nanotubes; dielectrophoresis; field emission; integration; sensor applications;
         
        
        
        
            Conference_Titel : 
Systems, Signals and Devices (SSD), 2012 9th International Multi-Conference on
         
        
            Conference_Location : 
Chemnitz
         
        
            Print_ISBN : 
978-1-4673-1590-6
         
        
            Electronic_ISBN : 
978-1-4673-1589-0
         
        
        
            DOI : 
10.1109/SSD.2012.6198083