• DocumentCode
    2056314
  • Title

    Structuring of carbon nanotubes for field emission based movement sensors

  • Author

    Loschek, Sergei ; Hermann, Sascha ; Yu, Haibo ; Schulz, Stefan E. ; Gessner, Thomas

  • Author_Institution
    Center for Microtechnologies, Chemnitz Univ. of Technol., Chemnitz, Germany
  • fYear
    2012
  • fDate
    20-23 March 2012
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    This paper addresses the exploitation of the field emitting properties of carbon nanotubes for movement sensor applications. To utilize this transducer principle a well defined gap between the field emitting carbon nanotubes and the counter electrode must be formed. Three different methods to dissect the dielectrophoretically deposited carbon nanotubes in a reproducible way are presented.
  • Keywords
    carbon nanotubes; field emission; nanosensors; counter electrode; dielectrophoretically deposited carbon nanotubes; field emitting properties; movement sensor applications; transducer principle; Carbon nanotubes; Electric breakdown; Electrical resistance measurement; Electrodes; Ion beams; Micromechanical devices; Sensors; MEMS/NEMS; carbon nanotubes; dielectrophoresis; field emission; integration; sensor applications;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Systems, Signals and Devices (SSD), 2012 9th International Multi-Conference on
  • Conference_Location
    Chemnitz
  • Print_ISBN
    978-1-4673-1590-6
  • Electronic_ISBN
    978-1-4673-1589-0
  • Type

    conf

  • DOI
    10.1109/SSD.2012.6198083
  • Filename
    6198083
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2056314