Title :
Tens Femtogram Resoluble Piezoresistive Cantilever Sensors with Optimized High-Mode Resonance Excitation
Author :
Jin, Dazhong ; Liu, Jian ; Li, Xinxin ; Liu, Min ; Zuo, Guomin ; Wang, Yuelin ; Yu, Haitao ; Ge, Xiaohong
Author_Institution :
State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Shanghai
Abstract :
Ultra-sensitive mass sensor is demanded for bio/chemical molecular detection. A piezoresistive resonant cantilever sensor with optimized is developed with an optimized electromagnetic excitation for high-mode flexure resonance. In our experiment, it has been proved that the quality factor of the resonant sensor can be improved by this optimized high-mode resonance exciting technique. Experimental results have shown that the optimized excitation for the resonant cantilever sensor can effectively improve the mass-sensing resolution to 29fg, thereby, improving the bio/chemical sensor performance.
Keywords :
Q-factor; bioMEMS; biosensors; cantilevers; chemical sensors; microsensors; piezoresistive devices; bio/chemical molecular detection; electromagnetic excitation; high-mode flexure resonance; microelectromechanical devices; quality factor; resonant sensor; tens femtogram resoluble piezoresistive cantilever sensors; ultrasensitive mass sensor; Atomic force microscopy; Biosensors; Chemical and biological sensors; Chemical sensors; Effective mass; Piezoresistance; Q factor; Resonance; Resonant frequency; Ultrafast optics; Biosensors; Microelectromechanical devices; Piezoresistors; Resonance;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on
Conference_Location :
Zhuhai
Print_ISBN :
1-4244-0139-9
Electronic_ISBN :
1-4244-0140-2
DOI :
10.1109/NEMS.2006.334906
