Title :
Three dimensional atom probe and field ion microscopy analysis of Co/Pd multilayers for perpendicular media applications
Author :
Ma, Y.Q. ; Petford-Long, A.K. ; Cerezo, A. ; Larson, D.J. ; Nolan, T.P.
Author_Institution :
Dept. of Mater., Oxford Univ., UK
fDate :
March 30 2003-April 3 2003
Abstract :
Perpendicular magnetic recording is being considered as an important candidate for achieving extremely high density magnetic recording with high thermal stability. One set of materials being most widely studied for this application are Co/Pd and Co/Pt multilayer films. A series of Co/Pd multilayer films, seeded with a Ti-based bilayer seed, were deposited on Si wafers that had been patterned into posts of about 3 micron diameter. Following deposition the posts were patterned using a focus ion beam (FIB) system to form the needle-shaped samples required for 3DAP analysis. The atomic scale composition distribution was characterised using 3DAP, and HREM was used to characterise the atomic scale structure of the films.
Keywords :
atom probe field ion microscopy; cobalt; field emission ion microscopy; magnetic multilayers; palladium; perpendicular magnetic recording; thermal stability; 3 micron; 3DAP analysis; Co-Pd; Co/Pd multilayers; HREM; Si; Ti-based bilayer seed; atomic scale composition distribution; extremely high density magnetic recording; field ion microscopy; focus ion beam system; high thermal stability; needle-shaped samples; perpendicular magnetic recording; perpendicular media applications; three dimensional atom probe microscopy; Atomic layer deposition; Magnetic analysis; Magnetic films; Magnetic multilayers; Magnetic recording; Microscopy; Nonhomogeneous media; Perpendicular magnetic recording; Probes; Thermal stability;
Conference_Titel :
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7647-1
DOI :
10.1109/INTMAG.2003.1230893
