• DocumentCode
    2057496
  • Title

    A Novel Passive Membrane Pumping Nano Fountain-Pen

  • Author

    Lee, Young-Kwan ; Lee, Suk-Han ; Kim, Youn-Jea ; Kim, Hunmo

  • Author_Institution
    Sch. of Mech. Eng., Sungkyunkwan Univ., Suwon
  • fYear
    2006
  • fDate
    18-21 Jan. 2006
  • Firstpage
    1012
  • Lastpage
    1017
  • Abstract
    In this paper, flow control of nano fountain pen using active membrane pumping is investigated. DPN (Dip Pen Nano- Lithography) has a shortcoming in which is the need of frequent loading and unloading while coating for broadband patterning. This issue is caused by a limit in quantity of ink, which is tied on the tip surface. The control of fluid injection using active membrane pumping in chambers is the answer of the problem. The flow rates in channels with the presence of capillary force are analyzed including the cantilever deflection and the control of mass flow rates by deflection of membrane. Finally, in this paper, the membrane deflection using a nano indentation equipment has been experimentally examined.
  • Keywords
    cantilevers; capillarity; indentation; membranes; microchannel flow; nanolithography; nanopatterning; DPN; active membrane pumping; broadband patterning; cantilever deflection; capillary force; channel flow rate; dip pen nanolithography; fluid injection control; membrane deflection; nano fountain-pen; nano indentation equipment; passive membrane pumping; semiconductor circuit; Atomic force microscopy; Atomic measurements; Biomembranes; Coatings; Fluid flow control; Force control; Ink; Nanolithography; Pumps; Reservoirs; Flow control; Nano Fountain Pen Nanolithography;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on
  • Conference_Location
    Zhuhai
  • Print_ISBN
    1-4244-0139-9
  • Electronic_ISBN
    1-4244-0140-2
  • Type

    conf

  • DOI
    10.1109/NEMS.2006.334601
  • Filename
    4135118