DocumentCode
2057496
Title
A Novel Passive Membrane Pumping Nano Fountain-Pen
Author
Lee, Young-Kwan ; Lee, Suk-Han ; Kim, Youn-Jea ; Kim, Hunmo
Author_Institution
Sch. of Mech. Eng., Sungkyunkwan Univ., Suwon
fYear
2006
fDate
18-21 Jan. 2006
Firstpage
1012
Lastpage
1017
Abstract
In this paper, flow control of nano fountain pen using active membrane pumping is investigated. DPN (Dip Pen Nano- Lithography) has a shortcoming in which is the need of frequent loading and unloading while coating for broadband patterning. This issue is caused by a limit in quantity of ink, which is tied on the tip surface. The control of fluid injection using active membrane pumping in chambers is the answer of the problem. The flow rates in channels with the presence of capillary force are analyzed including the cantilever deflection and the control of mass flow rates by deflection of membrane. Finally, in this paper, the membrane deflection using a nano indentation equipment has been experimentally examined.
Keywords
cantilevers; capillarity; indentation; membranes; microchannel flow; nanolithography; nanopatterning; DPN; active membrane pumping; broadband patterning; cantilever deflection; capillary force; channel flow rate; dip pen nanolithography; fluid injection control; membrane deflection; nano fountain-pen; nano indentation equipment; passive membrane pumping; semiconductor circuit; Atomic force microscopy; Atomic measurements; Biomembranes; Coatings; Fluid flow control; Force control; Ink; Nanolithography; Pumps; Reservoirs; Flow control; Nano Fountain Pen Nanolithography;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on
Conference_Location
Zhuhai
Print_ISBN
1-4244-0139-9
Electronic_ISBN
1-4244-0140-2
Type
conf
DOI
10.1109/NEMS.2006.334601
Filename
4135118
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