Title :
Metal-dielectric photonic crystal for the enhancement of solar-blind ultraviolet silicon photodiodes
Author :
Sarajlic, Milija ; Jaksic, Zoran ; Jovanovic, Dusan
Author_Institution :
Inst. of Microelectron. Technol. & Single Crystals, Belgrade
Abstract :
We report the fabrication of metal-dielectric photonic crystals as bandpass filter for the UV radiation with a sidelobe suppression in excess of 4 orders of magnitude. The metal-dielectrics were designed for the enhancement of the operation of UV photodiodes and for the use of Si PIN photodiodes as solar-blind devices. The bandpass filters were fabricated by RF sputtering of alternating SiO2 and silver layers.
Keywords :
band-pass filters; p-i-n photodiodes; photonic crystals; solar radiation; PIN photodiodes; UV radiation; bandpass filter; metal-dielectric photonic crystal; sidelobe suppression; solar-blind ultraviolet silicon photodiodes; Band pass filters; Dielectric substrates; Fabrication; Microelectronics; Nonhomogeneous media; P-n junctions; PIN photodiodes; Photonic crystals; Silicon; Silver;
Conference_Titel :
Microelectronics, 2008. MIEL 2008. 26th International Conference on
Conference_Location :
Nis
Print_ISBN :
978-1-4244-1881-7
Electronic_ISBN :
978-1-4244-1882-4
DOI :
10.1109/ICMEL.2008.4559238
