• DocumentCode
    2057909
  • Title

    Metal-dielectric photonic crystal for the enhancement of solar-blind ultraviolet silicon photodiodes

  • Author

    Sarajlic, Milija ; Jaksic, Zoran ; Jovanovic, Dusan

  • Author_Institution
    Inst. of Microelectron. Technol. & Single Crystals, Belgrade
  • fYear
    2008
  • fDate
    11-14 May 2008
  • Firstpage
    121
  • Lastpage
    124
  • Abstract
    We report the fabrication of metal-dielectric photonic crystals as bandpass filter for the UV radiation with a sidelobe suppression in excess of 4 orders of magnitude. The metal-dielectrics were designed for the enhancement of the operation of UV photodiodes and for the use of Si PIN photodiodes as solar-blind devices. The bandpass filters were fabricated by RF sputtering of alternating SiO2 and silver layers.
  • Keywords
    band-pass filters; p-i-n photodiodes; photonic crystals; solar radiation; PIN photodiodes; UV radiation; bandpass filter; metal-dielectric photonic crystal; sidelobe suppression; solar-blind ultraviolet silicon photodiodes; Band pass filters; Dielectric substrates; Fabrication; Microelectronics; Nonhomogeneous media; P-n junctions; PIN photodiodes; Photonic crystals; Silicon; Silver;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics, 2008. MIEL 2008. 26th International Conference on
  • Conference_Location
    Nis
  • Print_ISBN
    978-1-4244-1881-7
  • Electronic_ISBN
    978-1-4244-1882-4
  • Type

    conf

  • DOI
    10.1109/ICMEL.2008.4559238
  • Filename
    4559238
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2057909