Title :
Micro/nanofabrication of two and three dimensional structures by two-photon polymerization
Author :
Duan, Xuan-Ming ; Sun, Hong-Bo ; Kaneko, Koshiro ; Nakamura, Atsusbi ; Shoji, Satoru ; Kawata, Satoshi
Author_Institution :
CREST, Japan Sci. & Technol. Corp., Suita, Japan
Abstract :
Femtosecond infrared laser pulses are useful for laser micro/nanofabrication of two and three dimensional (2D & 3D) structures through multiphoton process. 2D & 3D polymeric structures were fabricated by two-photon polymerization. These features were produced by designing multibeam interference and writing patterns. The influence of post-developing process, which leads to a dramatic change in 2D rod array, also be discussed. These methods provide simple and rapid approaches for creating templates with designed 2D & 3D structure in micro/nanometer scales.
Keywords :
laser materials processing; nanoparticles; nanotechnology; optical polymers; particle reinforced composites; photonic crystals; polymerisation; scanning electron microscopy; two-photon processes; 2D polymeric structure; 3D polymeric structures; designing multibeam interference; femtosecond infrared laser pulses; laser microfabrication; laser nanofabrication; multiphoton process; post-developing process; three dimensional structures; two dimensional structures; two-photon polymerization; Chemical lasers; Laser beams; Magnetic materials; Nanofabrication; Nanoparticles; Optical attenuators; Optical materials; Polymers; Resins; Ultrafast optics;
Conference_Titel :
Nanotechnology, 2003. IEEE-NANO 2003. 2003 Third IEEE Conference on
Print_ISBN :
0-7803-7976-4
DOI :
10.1109/NANO.2003.1230955
