DocumentCode
2058728
Title
Surface recristallization of CdS layers by pulsed - laser annealing
Author
Shindov, P. ; Kakanakov, R. ; Kolaklieva, L. ; Kaneva, Sv ; Anastasova, T.
Author_Institution
Dept. of Electron., Tech. Univ. - Sofia, Plovdiv
fYear
2008
fDate
11-14 May 2008
Firstpage
243
Lastpage
246
Abstract
Properties of spry pyrolysed CdS layers were changed purposefully using annealing by a pulsed-laser in oxygen ambient. The structural, phase and electrical characteristics before and after annealing have been compared. The layer surface has been studied by SEM, XRD and XPS analyses. The electrical and optic parameters have been measured as well. Layers with different structure and electro-optical characteristics have been obtained by changing the conditions of the subsequent treatment. The pulsed-laser annealing in the oxygen ambient leaded to partial oxidation of the polycrystalline layers and forming a photosensitive CdS - CdO structure. A correlation between the technological condition and the layer parameters has been found.
Keywords
II-VI semiconductors; X-ray diffraction; X-ray photoelectron spectra; cadmium compounds; electro-optical effects; laser beam annealing; recrystallisation; scanning electron microscopy; semiconductor thin films; surface composition; wide band gap semiconductors; CdS; SEM; XPS; XRD; electro optical effects; pulsed-laser annealing; surface composition; surface recrystallization; surface structure; Annealing; Laser transitions; Optical films; Optical pulses; Pulsed laser deposition; Scanning electron microscopy; Surface emitting lasers; Surface morphology; Surface treatment; X-ray scattering;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics, 2008. MIEL 2008. 26th International Conference on
Conference_Location
Nis
Print_ISBN
978-1-4244-1881-7
Electronic_ISBN
978-1-4244-1882-4
Type
conf
DOI
10.1109/ICMEL.2008.4559269
Filename
4559269
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