Title :
A single-domain 26 nm-pitch pattern for the X-Y quantum dot media template
Author :
Sakurai, Masatoshi
Author_Institution :
Corp. Res. & Dev. Center, Toshiba Corp., Kawasaki, Japan
Abstract :
Guided self-assembly patterns for a template of the X-Y type quantum dot storage media were investigated. By adjusting the length of polystyrene-poly methyl methacrylate (PS-PMMA) block copolymer chains and relative volume fractions, the pitch of the phase-separated hexagonal-packing PMMA dots structure was 26 nm. This corresponds to the recording density of 1.1 tera bit per square inch. Phase diagram with respect to the polymer size and the fraction ratio is presented. Guide structures for aligning the self-ordering patterns were prepared using the nanoimprint process. Equilateral triangle guides were found to be suitable for the hexagonal-packed self-ordering structure. A single-domain hexagonal-packing structure was formed with each crystal axis parallel to the side of the triangle.
Keywords :
nanolithography; phase diagrams; phase separation; polymer blends; quantum dots; self-assembly; 26 nm; X-Y quantum dot media template; crystal axis; fraction ratio; hexagonal packing structure; nanoimprint process; phase diagram; phase separation; polymer size; polystyrene-poly methyl methacrylate block copolymer chains; quantum dot storage media; recording density; relative volume fractions; self ordering patterns; single domain hexagonal packing structure; single domain pitch pattern; Costs; Magnetic recording; Magnetic separation; Nanostructures; Polymer films; Quantum dots; Self-assembly; Signal to noise ratio; Thermal stability; US Department of Transportation;
Conference_Titel :
Nanotechnology, 2003. IEEE-NANO 2003. 2003 Third IEEE Conference on
Print_ISBN :
0-7803-7976-4
DOI :
10.1109/NANO.2003.1230981
