• DocumentCode
    2059066
  • Title

    Effect of photon irradiation on SBT films

  • Author

    Ito, Takatoshi ; Nonaka, Hiroki ; Ohki, Yoshimichi ; Seol, Kwang Soo ; Choi, In-Hoon ; Kim, Yong-Tea

  • Author_Institution
    Waseda Univ., Tokyo, Japan
  • fYear
    2001
  • fDate
    2001
  • Firstpage
    661
  • Lastpage
    664
  • Abstract
    Simultaneous laser irradiation during thermal annealing is effective to lower the crystallization temperature of the perovskite structure. However, the surface of a Sr2Bi2Ta2O9 (SBT) film with the perovskite structure obtained by laser irradiation is not as smooth as one obtained by thermal annealing. In order to fabricate SBT films that can be used for ferroelectric memories, we need to reduce the surface damage. In the present research, the effect of photon irradiation on the surface damage of SBT is investigated
  • Keywords
    annealing; bismuth compounds; crystallisation; ferroelectric thin films; laser beam effects; strontium compounds; SBT film; Sr2Bi2Ta2O9; crystallization; ferroelectric memory; laser irradiation; perovskite structure; photon irradiation; surface damage; thermal annealing; Annealing; Bismuth; Crystallization; Ferroelectric films; Ferroelectric materials; Furnaces; Infrared heating; Optical pulses; Substrates; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical Insulating Materials, 2001. (ISEIM 2001). Proceedings of 2001 International Symposium on
  • Conference_Location
    Himeji
  • Print_ISBN
    4-88686-053-2
  • Type

    conf

  • DOI
    10.1109/ISEIM.2001.973761
  • Filename
    973761
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2059066