An estimator for the MEMS capacitive accelerometer based on adaptive back stepping theory

This paper presents a novel MEMS capacitive accelerometer which employs an estimator. This scheme is realized by adding an adaptive nonlinear observer to the conventional PID closed loop system. This estimator is used for online estimation of the parameter variations for MEMS accelerometers and gives the capability of self testing to the system. The performance of the proposed hybrid controller investigated here is validated by computer simulation.