Title :
Fabrication and characterization of AFM golden microcantilevers and measurement of small electromagnetic forces
Author :
Djuric, Z. ; Jokic, I. ; Frantlovic, M. ; Randjelovic, D. ; Radovic, D. Vasiljevic ; Smiljanic, M. ; Lazic, Z.
Author_Institution :
Inst. of Microelectron. Technol. & Single Crystals, Univ. of Belgrade, Belgrade
Abstract :
This paper presents results of research oriented towards developing a method for measurement of small electromagnetic forces using atomic force microscope (AFM). The method is based on the measurement of cantilever deflection due to influence of Lorentz force and enables determination of magnetic force and magnetic induction of various magnets and conductors carrying electric current. Design and fabrication of a cantilevers with "U" and "V" shape is presented. A homogenous composition of the microcantilever made of a conductive material (gold) is chosen in order to avoid the adverse bimaterial effect. Preliminary experimental results obtained by measuring interaction between a permanent magnet and current carrying cantilever are given.
Keywords :
atomic force microscopy; cantilevers; conducting materials; electromagnetic induction; gold; magnetic field measurement; magnetic forces; micromechanical devices; permanent magnets; AFM golden microcantilevers; Lorentz force; adverse bimaterial effect; atomic force microscope; cantilever deflection; conductive material; conductors; electromagnetic forces measurement; magnetic force; magnetic induction; permanent magnet; Atomic force microscopy; Atomic measurements; Conducting materials; Current measurement; Electric variables measurement; Electromagnetic forces; Electromagnetic measurements; Fabrication; Force measurement; Lorentz covariance;
Conference_Titel :
Microelectronics, 2008. MIEL 2008. 26th International Conference on
Conference_Location :
Nis
Print_ISBN :
978-1-4244-1881-7
Electronic_ISBN :
978-1-4244-1882-4
DOI :
10.1109/ICMEL.2008.4559297
