• DocumentCode
    2060087
  • Title

    Two-terminal Si-nanocrystal memory formed between the two metal layers

  • Author

    Fujita, Shinobu ; Yasuda, Shin-ichi ; Abe, Keiko ; Sugiyama, Naoharu

  • Author_Institution
    Adv. LSI Technol. Lab., Toshiba Corp., Kawasaki, Japan
  • Volume
    2
  • fYear
    2003
  • fDate
    12-14 Aug. 2003
  • Firstpage
    760
  • Abstract
    We propose MIM memory with Si-nanocrystals embedded in the insular has been demonstrateted. This memory is preferable for a nonvolatile memory cell that can be formed between the two metal layers of CMOS circuits and vertically stacked, since the device process is entirely compatible to Si device process.
  • Keywords
    CMOS memory circuits; MIM devices; elemental semiconductors; nanostructured materials; silicon; CMOS circuits; MIM memory; Si; Si device process; metal layers; nonvolatile memory cell; two terminal Si nanocrystal memory; CMOS memory circuits; Electrons; Inorganic materials; Large scale integration; Magnetic materials; Metal-insulator structures; Nonvolatile memory; Random access memory; Read-write memory; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology, 2003. IEEE-NANO 2003. 2003 Third IEEE Conference on
  • Print_ISBN
    0-7803-7976-4
  • Type

    conf

  • DOI
    10.1109/NANO.2003.1231024
  • Filename
    1231024