Title :
Disposable PDMS Diaphragm Micropump Actuated by PZT
Author :
Geng, Zhao-xin ; Cui, Da-Fu ; Wang, Hai-ning ; Chen, Xing
Author_Institution :
State Key Lab. of Transducer Tech., Chinese Acad. of Sci., Beijing
Abstract :
Through studying the micropump and microvalve used in microfluidic control chemical analysis from the design of structure, working principle and fabrication process, a novel PZT-driven micropump was developed. The construction and the fabrication process are quite simple. It consists of flexible PDMS pump diaphragm, base plate and piezo-bimorph actuator. Diaphragm, meanwhile, is an active valve whose functions are manipulating/directing/switching the flow direction (forward or backward) and bearing the load when in the closed state, and a buffer element too. Base plate has both nozzle/diffuser or straight hole and chamber made of silicon. The thickness of the micropump membrane is about 180 mum. The length, width and depth of micropump chamber cavity are 6 mm, 6 mm and 20 mum, respectively. The performances of the micropump, such as pump rate and backpressure, are characterized. As a flow-rectifying element, the diffusers and active valves are used instead of passive check valves. The flow rate and the backpressure of the micropump the type A and type B are about 1050 muL/min, 840 muL/min and 5 kPa when applying a 100 V square wave driving voltage at frequency of 35 Hz
Keywords :
diaphragms; lead compounds; microactuators; microfluidics; micropumps; microvalves; organic compounds; piezoelectric actuators; zirconium compounds; 100 V; 20 micron; 35 Hz; 5 kPa; 6 mm; PZT; PbZrO3TiO3; buffer element; diffuser; disposable PDMS diaphragm micropump; flow direction; flow-rectifying element; microfluidic control chemical analysis; micropump backpressure; micropump chamber cavity; micropump membrane; microvalve; nozzle; piezobimorph actuator; polydimethylsiloxane; pump rate; Actuators; Biomembranes; Chemical analysis; Fabrication; Microfluidics; Micropumps; Microvalves; Silicon; Valves; Voltage; MEMS; PDMS; PZT; micropump; microvalve;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on
Conference_Location :
Zhuhai
Print_ISBN :
1-4244-0139-9
Electronic_ISBN :
1-4244-0140-2
DOI :
10.1109/NEMS.2006.334783