Author :
Zhang, Haixia ; Li, Ming ; Zhang, Dacheng ; Tien, Norman C.
Abstract :
Due to the research work has been done in RF MEMS fields for more than 10 years, RF lumped elements, like inductor, tunable capacitor, CPW line and switch, are developed very well, and studied deeply. But for its wireless application, integrated tunable RF net work, which composed by these lumped elements are much more important and useful, especially in high and medium frequency system, high performance and low lost low-pass, band-pass filter, impedance match net work have widen application, especially, RF tunable filters will be a big benefit for the system. In this paper, we put forward our effort in fabrication research in such an integrated tunable filters, applying glass substrate for RF inductor, CPW line and MIM capacitors, using anodic bonding to integrate glass and silicon wafer, and then fabrication bulk structure of tunable capacitor and switch by DRIE, to be a tunable system. This process gives capability to make different tunable RF network in GHz wireless system
Keywords :
MIM devices; capacitors; coplanar waveguides; inductors; microswitches; radio access networks; radiofrequency filters; radiofrequency integrated circuits; sputter etching; CPW line; DRIE; GHz wireless system; MIM capacitors; RF MEMS fields; RF inductor; anodic bonding; coplanar waveguide lines; deep reactive ion etching; fabrication research; glass substrate; glass wafer; integrated RF tunable filter; metal-insulator-metal capacitors; microelectromechanical system; process research; radiofrequency filter; silicon wafer; switch; tunable capacitor; Band pass filters; Coplanar waveguides; Fabrication; Glass; Impedance; Inductors; MIM capacitors; Radio frequency; Radiofrequency microelectromechanical systems; Switches; Integration; MEMS fabrication; RF Tunable filter; wireless net work;
