• DocumentCode
    2060266
  • Title

    Reliability acceleration model of stacked ZrO2-Al2O3-ZrO2 MIM capacitor with cylinder type

  • Author

    Seo, Jae Yong ; Seok, Jung Eun ; Kim, Hyun Joo ; Kim, Hyun Jung ; Park, Hong Sik ; Jeon, Jae Eun ; Lee, Won Shik

  • Author_Institution
    Memory Div., Samsung Electron., Hwasung
  • fYear
    2008
  • fDate
    11-14 May 2008
  • Firstpage
    521
  • Lastpage
    524
  • Abstract
    An exact lifetime extrapolation models of ZrO2-Al2O3-ZrO2 (ZAZ) stack capacitor with metal-insulator-metal (MIM) structure was studied in this paper. From the extensive long-term test result (~ 7.5 months) it was found that the power-law model is suitable as a exact lifetime extrapolation model for ZAZ dielectric reliability.
  • Keywords
    MIM devices; aluminium compounds; capacitors; extrapolation; reliability; zirconium compounds; MIM capacitor reliability; ZrO2-Al2O3-ZrO2; acceleration model; exact lifetime extrapolation models; metal-insulator-metal structure; power-law model; Acceleration; Microelectronics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics, 2008. MIEL 2008. 26th International Conference on
  • Conference_Location
    Nis
  • Print_ISBN
    978-1-4244-1881-7
  • Electronic_ISBN
    978-1-4244-1882-4
  • Type

    conf

  • DOI
    10.1109/ICMEL.2008.4559337
  • Filename
    4559337
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2060266