• DocumentCode
    2060331
  • Title

    Polymer Micro-and Nano-scale Fabrication Technology Development for Bioinspired Sensing

  • Author

    Liu, Chang ; Engel, Jonathan ; Chen, Jack ; Chen, Nannan ; Pandya, Saunvit ; Yang, Yingchen ; Tucker, Craig ; Coombs, Shery ; Humphrey, Joseph ; Bleckmann, Horst

  • Author_Institution
    Micro & Nanotechnol. Lab., Illinois Univ., Urbana-Champaign, IL
  • fYear
    2006
  • fDate
    18-21 Jan. 2006
  • Firstpage
    1470
  • Lastpage
    1473
  • Abstract
    We report on the development of new elastomers and processes that utilize polymers such as PDMS, FSR (force sensitive resistor) polymer, MWCNT, and polyurethane to realize bioinspired sensors such as artificial haircells. In nature, haircell sensors are used by fish to sense flow, by spiders to sense vibration, and by some vertebrates for hearing and acoustics. An artificial haircell sensor is designed to mimic the ability of natural haircells to sense flow, vibration, and touch. However, in order to improve the sensitivity and robustness, the use of polymers is necessary. In this paper, we present the different generations of bioinspired artificial haircell sensors, along with the polymers and processes needed for their construction
  • Keywords
    bio-inspired materials; biomimetics; biosensors; carbon nanotubes; elastomers; microsensors; nanobiotechnology; nanostructured materials; FSR polymer; MWCNT; PDMS; artificial haircell sensor; bioinspired sensing; bioinspired sensors; elastomers; flow sensing; force sensitive resistor polymer; multiwalled carbon nanotube; polydimethylsiloxane; polymer microscale fabrication technology; polymer nanoscale fabrication technology; polyurethane; touch sensing; vibration sensing; Acoustic sensors; Auditory system; Biosensors; Fabrication; Force sensors; Marine animals; Polymers; Resistors; Robustness; Tactile sensors; artificial haircell sensor; flow sensors; polymer MEMS; polymers; sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on
  • Conference_Location
    Zhuhai
  • Print_ISBN
    1-4244-0139-9
  • Electronic_ISBN
    1-4244-0140-2
  • Type

    conf

  • DOI
    10.1109/NEMS.2006.334809
  • Filename
    4135221