DocumentCode
2060331
Title
Polymer Micro-and Nano-scale Fabrication Technology Development for Bioinspired Sensing
Author
Liu, Chang ; Engel, Jonathan ; Chen, Jack ; Chen, Nannan ; Pandya, Saunvit ; Yang, Yingchen ; Tucker, Craig ; Coombs, Shery ; Humphrey, Joseph ; Bleckmann, Horst
Author_Institution
Micro & Nanotechnol. Lab., Illinois Univ., Urbana-Champaign, IL
fYear
2006
fDate
18-21 Jan. 2006
Firstpage
1470
Lastpage
1473
Abstract
We report on the development of new elastomers and processes that utilize polymers such as PDMS, FSR (force sensitive resistor) polymer, MWCNT, and polyurethane to realize bioinspired sensors such as artificial haircells. In nature, haircell sensors are used by fish to sense flow, by spiders to sense vibration, and by some vertebrates for hearing and acoustics. An artificial haircell sensor is designed to mimic the ability of natural haircells to sense flow, vibration, and touch. However, in order to improve the sensitivity and robustness, the use of polymers is necessary. In this paper, we present the different generations of bioinspired artificial haircell sensors, along with the polymers and processes needed for their construction
Keywords
bio-inspired materials; biomimetics; biosensors; carbon nanotubes; elastomers; microsensors; nanobiotechnology; nanostructured materials; FSR polymer; MWCNT; PDMS; artificial haircell sensor; bioinspired sensing; bioinspired sensors; elastomers; flow sensing; force sensitive resistor polymer; multiwalled carbon nanotube; polydimethylsiloxane; polymer microscale fabrication technology; polymer nanoscale fabrication technology; polyurethane; touch sensing; vibration sensing; Acoustic sensors; Auditory system; Biosensors; Fabrication; Force sensors; Marine animals; Polymers; Resistors; Robustness; Tactile sensors; artificial haircell sensor; flow sensors; polymer MEMS; polymers; sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on
Conference_Location
Zhuhai
Print_ISBN
1-4244-0139-9
Electronic_ISBN
1-4244-0140-2
Type
conf
DOI
10.1109/NEMS.2006.334809
Filename
4135221
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