• DocumentCode
    2060356
  • Title

    How to monitor Metal-Insulator-Metal (MIM) capacitors dielectric reliability

  • Author

    Martinez, V. ; Besset, C. ; Monsieur, F. ; Ney, D. ; Montes, L. ; Ghibaudo, G.

  • Author_Institution
    Reliability Team, ST Microelectron., Crolles
  • fYear
    2008
  • fDate
    11-14 May 2008
  • Firstpage
    537
  • Lastpage
    540
  • Abstract
    In this paper, a new method to monitor MIM capacitors dielectric reliability has been developed in order to avoid misinterpretation due to self-heating, fringe effects and dielectric thickness spread. Original test structures have been designed with the aim of emphasize, model and thus correct these effects.
  • Keywords
    MIM devices; capacitors; reliability; MIM capacitors; dielectric reliability; dielectric thickness spread; effects; metal-insulator-metal capacitors; self-heating; Dielectrics; MIM capacitors; Metal-insulator structures; Monitoring;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics, 2008. MIEL 2008. 26th International Conference on
  • Conference_Location
    Nis
  • Print_ISBN
    978-1-4244-1881-7
  • Electronic_ISBN
    978-1-4244-1882-4
  • Type

    conf

  • DOI
    10.1109/ICMEL.2008.4559341
  • Filename
    4559341
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2060356