Title :
A novel sulfide-assisted growth of silicon nano-wires
Author :
Niu, Junjie ; Sha, Jian ; Liu, Zhihong ; Yu, Jun ; Su, Zixue ; Yang, Qing ; Yang, Deren
Author_Institution :
State Key Lab. of Silicon Mat., Zhejiang Univ., Hangzhou, China
Abstract :
A large-scale SiNWs with the diameter of ∼20-30 nm and the length of tens of micrometers formed on silicon substrates using a novel evaporation of sulfides (sulphur and zinc sulfide) at ∼1080°C were synthesized; The source of SiNWs came from silicon wafers rather than silane gas as reported before. It was found that the tip of SiNWs contained sulfur, while the other positions of SiNWs did not. It is considered that the decomposition of SiS resulted in the formation of SiNWs. As referring to the oxygen-assisted growth model of SiNWs by evaporation of silicon oxide, a corresponding sulfide-assisted model was suggested.
Keywords :
decomposition; elemental semiconductors; evaporation; nanowires; semiconductor growth; semiconductor quantum wires; silicon; Si; decomposition; evaporation; silicon nanowires; sulfide-assisted growth; Chemical lasers; Chemical technology; Electron emission; Furnaces; Nanowires; Scanning electron microscopy; Semiconductor device modeling; Silicon; Transmission electron microscopy; Zinc compounds;
Conference_Titel :
Semiconducting and Insulating Materials, 2004. SIMC-XIII-2004. 13th International Conference on
Print_ISBN :
0-7803-8668-X
DOI :
10.1109/SIM.2005.1511409