DocumentCode
2060499
Title
Automatic baseline-sample-selection scheme for baseline predictive maintenance
Author
Chun-Fang Chen ; Yao-Sheng Hsieh ; Fan-Tien Cheng ; Hsien-Cheng Huang ; Wang, Shun-Chung
Author_Institution
Inst. of Manuf. Inf. & Syst., Nat. Cheng Kung Univ., Tainan, Taiwan
fYear
2013
fDate
17-20 Aug. 2013
Firstpage
183
Lastpage
188
Abstract
A virtual-metrology-based (VM-based) baseline-predictive-maintenance (BPM) scheme was proposed by the authors recently. By applying the BPM scheme, fault diagnosis and prognosis can be accomplished and the requirement of massive historical failure data can also be released. The accuracy of the BPM scheme highly depends on the correctness of the baseline models in the BPM scheme. The samples of creating the target-device (TD) baseline model consist of the concise and healthy (C&H) historical samples and the fresh samples just after maintenance. Originally, each one of the C&H samples was checked manually to ensure that the sample was generated under healthy status and its data quality is good. However, this health-&-quality check process is so tedious and may also neglect deleting contradictory samples, which may deteriorate the BPM results and prohibit the usage of the BPM scheme. The purpose of this paper is to develop an automatic baseline-sample-selection (ABSS) scheme for selecting the C&H samples and deleting the contradictory samples automatically.
Keywords
condition monitoring; failure analysis; fault diagnosis; maintenance engineering; plasma CVD; virtual instrumentation; C and H historical samples; VM-based BPM scheme; automatic baseline sample selection scheme; baseline predictive maintenance; concise and healthy historical samples; data quality; fault diagnosis; fault prognosis; health and quality check process; massive historical failure data; plasma-enhanced chemical vapor deposition tool; target-device baseline model; virtual metrology-based baseline-predictive-maintenance scheme; Analytical models; Data models; Indexes; Maintenance engineering; Predictive models; Testing; Valves; Baseline predictive maintenance (BPM) scheme; automatic baseline-sample-selection (ABSS) scheme; virtual metrology (VM);
fLanguage
English
Publisher
ieee
Conference_Titel
Automation Science and Engineering (CASE), 2013 IEEE International Conference on
Conference_Location
Madison, WI
ISSN
2161-8070
Type
conf
DOI
10.1109/CoASE.2013.6653934
Filename
6653934
Link To Document