Testing of MEMS Structure by Atomic Force Microscope

Author

Fok, L.M. ; Fung, K.M. ; Liu, Y.H. ; Li, Wen J.

Author_Institution

Autom. & Comput.-Aided Eng., Chinese Univ. of Hong Kong

fYear

2006

fDate

18-21 Jan. 2006

Firstpage

1536

Lastpage

1539

Abstract

This paper focuses on nano-scale analysis of mechanical properties of polymer and carbon nanotubes (CNT) embedded MEMS devices using the probe tip of the atomic force microscope (AFM). The mechanical properties of surfaces of layered materials were investigated by using nanoindentation produced with tips of an AFM. Experiment results indicated the bending characteristics of the device and could also indicate the Young´s modulus of the CNT embedded microstructure. Our objective is to investigate the change in nano-scale mechanical properties and piezoresistivity of bulk carbon nanotubes with the application of local probe manipulation

Keywords

Young´s modulus; atomic force microscopy; bending; carbon nanotubes; indentation; micromechanical devices; nanotube devices; piezoresistance; polymers; C; MEMS devices; MEMS structure; Young modulus; atomic force microscope; bending; carbon nanotubes; mechanical property; microelectromechanical systems; nanoindentation; nanoscale analysis; piezoresistivity; polymer; probe manipulation; Atomic force microscopy; Atomic layer deposition; Carbon nanotubes; Mechanical factors; Microelectromechanical devices; Micromechanical devices; Nanoscale devices; Polymers; Probes; Testing; Atomic Force Microscope; carbon nanotubes;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on

Conference_Location

Zhuhai

Print_ISBN

1-4244-0139-9

Electronic_ISBN

1-4244-0140-2

Type

conf

DOI

10.1109/NEMS.2006.334842

Filename

4135236