Silicon nanowire-based nanoactuator

A new class of nanoactuator based on the bimetal thermal effect of chromium-coated silicon nanowire has been demonstrated. The nanoactuator is fabricated by the localized synthesis process of silicon nanowires and coating them with a 5 nm-thick layer of chromium. Actuation occurs when the supporting microheater is heated locally by resistive joule heating which causes the nanowires to deflect due to the difference in the coefficient of thermal expansion (CTE) between chromium and silicon. Experimentally, the maximum measured deflection of a 3.66 μm-long silicon nanowire is 1.52 μm under a power input of 31.4 mW to the microheater.