Title :
Correlation between nanocavity shrinkage with preferential amorphisation via ultrafast interaction
Author :
Zhu, Xianfang ; Wang, Zhanguo
Author_Institution :
Dept. of Phys., Xiamen Univ., China
Abstract :
We model the recent experimental results and demonstrate that the internal shrinkage of nanocavities in silicon is intrinsically associated with preferential amorphization as induced by self-ion irradiation. The paper reveals novel thermodynamic nonequilibrium properties of such an open-volume nanostructure in condensed matter and also of covalently bound amorphous materials both at nanosize scale and during ultrafast process.
Keywords :
amorphisation; elemental semiconductors; high-speed optical techniques; ion beam effects; microcavities; nanostructured materials; silicon; solid-state phase transformations; Si; nanocavity shrinkage; preferential amorphisation; self-ion irradiation; thermodynamic nonequilibrium; ultrafast interaction; Amorphous materials; Annealing; Atomic measurements; Laboratories; Nanomaterials; Semiconductor materials; Shape; Silicon; Temperature; Thermodynamics;
Conference_Titel :
Semiconducting and Insulating Materials, 2004. SIMC-XIII-2004. 13th International Conference on
Print_ISBN :
0-7803-8668-X
DOI :
10.1109/SIM.2005.1511429
