Title :
MEMS based conductivity-temperature-depth (CTD) sensor for harsh oceanic environment
Author :
Aravamudhan, S. ; Bhat, S. ; Bethala, B. ; Bhansali, S. ; Langebrake, L.
Author_Institution :
Dept. of Electr. Eng., South Florida Univ., Tampa, FL
Abstract :
A MEMS based silicon CTD sensor for ocean environment is presented. The sensor components are a capacitive conductivity sensor (C), gold doped silicon temperature sensor (T), a multiple diaphragm piezoresistive pressure sensor (D). The sensor elements have further been packaged to protect them from harsh marine environment. This paper provides the design, fabrication and initial test results on a prototype CTD sensor
Keywords :
capacitive sensors; microsensors; oceanographic techniques; pressure measurement; pressure sensors; spatial variables measurement; temperature measurement; temperature sensors; MEMS; capacitive conductivity sensor; conductivity-temperature-depth sensor; gold doped silicon temperature sensor; multiple diaphragm piezoresistive pressure sensor; oceanic environment; sensor design; sensor elements; sensor fabrication; silicon CTD sensor; Capacitive sensors; Conductivity; Gold; Micromechanical devices; Oceans; Packaging; Piezoresistance; Protection; Silicon; Temperature sensors;
Conference_Titel :
OCEANS, 2005. Proceedings of MTS/IEEE
Conference_Location :
Washington, DC
Print_ISBN :
0-933957-34-3
DOI :
10.1109/OCEANS.2005.1640015
