Title :
Electromechano-optically tuned ring resonator in silicon on insulator, monolithically integrated with a microcantilever
Author :
Kauppinen, Lasse J. ; Abdulla, Shahina M C ; Krijnen, Gijs J M ; Pollnau, Markus ; De Ridder, René M.
Author_Institution :
Integrated Opt. Microsyst. (IOMS) Group, Univ. of Twente, Enschede, Netherlands
Abstract :
We demonstrate, for the first time, the use of a monolithically integrated silicon nitride cantilever for tuning a silicon microring resonator over a 50 pm wavelength range by applying 8.5V, without affecting the ring´s Q-factor.
Keywords :
Q-factor; cantilevers; integrated optics; micro-optomechanical devices; micromechanical resonators; optical resonators; optical tuning; silicon compounds; silicon-on-insulator; Q-factor; Si; Si3N4; electromechano-optically tuned ring resonator; monolithically integrated microcantilever; silicon microring resonator; silicon nitride cantilever; silicon-on-insulator; voltage 8.5 V; wavelength 50 pm; Switches;
Conference_Titel :
Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011 Conference on and 12th European Quantum Electronics Conference
Conference_Location :
Munich
Print_ISBN :
978-1-4577-0533-5
Electronic_ISBN :
Pending
DOI :
10.1109/CLEOE.2011.5942720
