Title :
Light turning mirrors for hybrid integration of optical waveguides in SiON technology and CMOS based photo-detectors
Author :
Civitci, Fehmi ; Driessen, Alfred ; Hoekstra, Hugo J W M
Author_Institution :
Integrated Opt. Microsyst. (IOMS) Group, Univ. of Twente, Enschede, Netherlands
Abstract :
We propose a new method for the efficient integration of optical waveguides and CMOS based PDs. This method uses a TIR mirror for directing the output of the WG onto a PD. The mirror is considered to be formed at the interface between oxide and air. The angle between surface normal of the mirrors and waveguides is chosen to be 45°. This angle is sufficient to give TIR on the interface between oxide and air.
Keywords :
CMOS integrated circuits; integrated optics; mirrors; optical waveguides; photodetectors; reflectivity; silicon compounds; CMOS based photodetectors; SiON; SiON technology; hybrid integration; light turning mirrors; optical waveguides; total internal reflection mirror;
Conference_Titel :
Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011 Conference on and 12th European Quantum Electronics Conference
Conference_Location :
Munich
Print_ISBN :
978-1-4577-0533-5
Electronic_ISBN :
Pending
DOI :
10.1109/CLEOE.2011.5942738
