Title :
Fabrication of multilayer crystalline rib waveguides by a combined multi-step Pulsed Laser Deposition/precision machining technique
Author :
Sloyan, Katherine A. ; Carpenter, Lewis G. ; May-Smith, Timothy C. ; Holmes, Christopher ; Gates, James C. ; Smith, Peter G R ; Eason, Robert W.
Author_Institution :
Optoelectron. Res. Centre, Univ. of Southampton, Southampton, UK
Abstract :
The authors present a technique that combines PLD with precision sawing (used previously to machine silica-on-silicon cantilevers) to create multilayer crystalline garnet ribs quickly and easily.
Keywords :
garnets; optical fabrication; optical multilayers; optical waveguides; pulsed laser deposition; rib waveguides; sawing; combined multistep pulsed laser deposition; multilayer crystalline garnet ribs; multilayer crystalline rib waveguides; precision machining; precision sawing; silica-on-silicon cantilevers; Optical device fabrication; Optical diffraction; Optical films;
Conference_Titel :
Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011 Conference on and 12th European Quantum Electronics Conference
Conference_Location :
Munich
Print_ISBN :
978-1-4577-0533-5
Electronic_ISBN :
Pending
DOI :
10.1109/CLEOE.2011.5942740
