Title :
Dielectrophoretic nanoassembly of individual carbon nanotubes onto nanoelectrodes
Author :
Subramanian, Arunkumar ; Nelson, Bradley J. ; Dong, Lixin ; Bell, Dominik
Author_Institution :
Inst. of Robotics & Intelligent Syst., Swiss Fed. Inst. of Technol., Zurich
Abstract :
Dielectrophoretic assembly of individual carbon nanotube (CNT) based NEMS is experimentally realized with nanoelectrodes fabricated using electron-beam lithography. The successful manipulation and assembly of single carbon nanotubes using dielectrophoretic forces produced by nanoelectrodes lead to a higher integration of CNTs into both nanoelectronics and NEMS
Keywords :
assembling; carbon nanotubes; electron beam lithography; nanoelectronics; NEMS; carbon nanotubes; dielectrophoretic forces; dielectrophoretic nanoassembly; electron-beam lithography; manipulation; nanoelectrodes; nanoelectromechanical systems; nanoelectronics; Atomic force microscopy; Carbon nanotubes; Chemical vapor deposition; Dielectrophoresis; Electric fields; Electrodes; Force measurement; Nanoelectromechanical systems; Nanoscale devices; Robotic assembly;
Conference_Titel :
Assembly and Task Planning: From Nano to Macro Assembly and Manufacturing, 2005. (ISATP 2005). The 6th IEEE International Symposium on
Conference_Location :
Montreal, Que.
Print_ISBN :
0-7803-9080-6
DOI :
10.1109/ISATP.2005.1511473
