• DocumentCode
    2062317
  • Title

    Optical anisotropy in research of nanolayers

  • Author

    Evgenyevich, Geiduk Alexey

  • Author_Institution
    Laboratory of Optical Materials and Structures, A. V. Rzhauov Iustitute of Semiconductor Physics, Siberian Branch of the Russian Academy of Sciences
  • fYear
    2010
  • fDate
    9-11 Dec. 2010
  • Firstpage
    101
  • Lastpage
    108
  • Abstract
    • Implementation of high-k — dielectrics in microchips production. • In-process control of gate dielectrics production.
  • Keywords
    Optical polarization; Optical reflection; Optical refraction; Polarimetry; Production;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Fundamental Problems of Micro/Nanosystems Technologies (MNST), 2010 IEEE 2nd Russia School and Seminar on
  • Conference_Location
    Novosibirsk, Russia
  • Print_ISBN
    978-1-4244-5962-9
  • Electronic_ISBN
    978-1-4244-5963-6
  • Type

    conf

  • DOI
    10.1109/MNST.2010.5687146
  • Filename
    5687146
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2062317