Title :
Optical anisotropy in research of nanolayers
Author :
Evgenyevich, Geiduk Alexey
Author_Institution :
Laboratory of Optical Materials and Structures, A. V. Rzhauov Iustitute of Semiconductor Physics, Siberian Branch of the Russian Academy of Sciences
Abstract :
• Implementation of high-k — dielectrics in microchips production. • In-process control of gate dielectrics production.
Keywords :
Optical polarization; Optical reflection; Optical refraction; Polarimetry; Production;
Conference_Titel :
Fundamental Problems of Micro/Nanosystems Technologies (MNST), 2010 IEEE 2nd Russia School and Seminar on
Conference_Location :
Novosibirsk, Russia
Print_ISBN :
978-1-4244-5962-9
Electronic_ISBN :
978-1-4244-5963-6
DOI :
10.1109/MNST.2010.5687146
